LEE , Hyun-Chul; CHANG , Hyun-Jin; WOO , Ho-Sung. Overlay Mark Design Using Irregular Grating Patterns. International Journal on Advanced Science, Engineering and Information Technology, [S. l.], v. 14, n. 2, p. 548–554, 2024. DOI: 10.18517/ijaseit.14.2.19659. Disponível em: https://ijaseit.insightsociety.org/index.php/ijaseit/article/view/19659. Acesso em: 16 jun. 2024.